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Performance Improvement of Mems Based Capacitive COMB Accelerometers
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Performance Improvement of Mems Based Capacitive COMB Accelerometers
Murthy, Mruthyunjaya Swamy Kenkere Balashantha
URI:
http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/7428
Date:
2016-11-01
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Performance Improvement of Mems Based Capacitive COMB Accelerometers
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