Performance Improvement of Mems Based Capacitive COMB Accelerometers

dc.contributor.author	Murthy, Mruthyunjaya Swamy Kenkere Balashantha
dc.date.accessioned	2017-03-09T11:02:20Z
dc.date.available	2017-03-09T11:02:20Z
dc.date.issued	2016-11-01
dc.identifier.govdoc	NB15639
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/7428
dc.language.iso	en	en
dc.publisher	IIT, Kharagpur	en
dc.subject	MEMS Accelerometers	en
dc.subject	Comb Structures	en
dc.subject	SOI Devices	en
dc.subject	Trench-Free Method	en
dc.subject	Polysilicon Devices	en
dc.subject	Multi-Fold Springs	en
dc.title	Performance Improvement of Mems Based Capacitive COMB Accelerometers	en
dc.type	Thesis	en