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2. Ph.D Theses of IIT Kharagpur
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Performance Improvement of Mems Based Capacitive COMB Accelerometers
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Browsing Performance Improvement of Mems Based Capacitive COMB Accelerometers by Subject

Browsing Performance Improvement of Mems Based Capacitive COMB Accelerometers by Subject

Now showing items 1-6 of 6

Subject
Comb Structures [1]
MEMS Accelerometers [1]
Multi-Fold Springs [1]
Polysilicon Devices [1]
SOI Devices [1]
Trench-Free Method [1]

Now showing items 1-6 of 6

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