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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs
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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs
Samanta, Santanu Kumar
URI:
http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2466
Date:
2003-09
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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs
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