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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs

Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs

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Author : Santanu Kumar Samanta
Guide : Prof. Chinmay K. Maiti and H. D. Banerjee
Dept. of Materials Science Centre
Indian Institute of Technology Kharagpur
September, 2003

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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs

Samanta, Santanu Kumar (IIT, Kharagpur, 2003-09)

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Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs

Studies on Ultrathin Oxide and Oxynitride Gate Dielectric Films for Silicon Hetero-FETs

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