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Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices
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Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices
Mahapatra, Rajat
URI:
http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/9244
Date:
2004-09-01
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Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices
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