Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer

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Author : Ravindra Mukhyia
Guide : Dr. Tarun K. Bhattacharyya
DEPARTMENT OF ELECTRONICS AND ELECTRICAL COMMUNICATION ENGINEERING INDIAN INSTITUTE OF TECHNOLOGY, KHARAGPUR, 2010, © 2010 Ravindra Mukhiya. All rights reserved.

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Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer

Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer

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