Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer http://127.0.0.1/xmlui/handle/123456789/694 2026-04-17T11:58:41Z 2026-04-17T11:58:41Z Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer Mukhyia, Ravindra http://127.0.0.1/xmlui/handle/123456789/695 2015-06-01T12:22:24Z 2010-01-01T00:00:00Z Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer Mukhyia, Ravindra Micro-Electro-Mechanical system (MEMS) based accelerometers are vastly attractive due to their low cost, small size, low power consumption and robust performances. Acceleration sensors have wide varieties of applications in military, industry, medical, automotive and consumer electronics. 2010-01-01T00:00:00Z