Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer http://127.0.0.1/xmlui/handle/123456789/694 2026-04-17T18:51:03Z Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer http://127.0.0.1/xmlui/handle/123456789/695 Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer Mukhyia, Ravindra Micro-Electro-Mechanical system (MEMS) based accelerometers are vastly attractive due to their low cost, small size, low power consumption and robust performances. Acceleration sensors have wide varieties of applications in military, industry, medical, automotive and consumer electronics. 2010-01-01T00:00:00Z