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  4. Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides
Please use this identifier to cite or link to this item: http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/14071
Title: Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides
Authors: Saha, Chumki
Keywords: Polysilicon
Silicon-Germanium
Thermal Oxidation
R.M.S. Roughness
Ion Beam Sputtering
Issue Date: Apr-2000
Publisher: IIT Kharagpur
Gov't Doc #: NB12531
URI: http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/14071
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