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http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/14071Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Saha, Chumki | - |
| dc.date.accessioned | 2024-05-07T10:50:03Z | - |
| dc.date.available | 2024-05-07T10:50:03Z | - |
| dc.date.issued | 2000-04 | - |
| dc.identifier.govdoc | NB12531 | - |
| dc.identifier.uri | http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/14071 | - |
| dc.language.iso | en | en_US |
| dc.publisher | IIT Kharagpur | en_US |
| dc.subject | Polysilicon | en_US |
| dc.subject | Silicon-Germanium | en_US |
| dc.subject | Thermal Oxidation | en_US |
| dc.subject | R.M.S. Roughness | en_US |
| dc.subject | Ion Beam Sputtering | en_US |
| dc.title | Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides | en_US |
| dc.type | Thesis | en_US |
| Appears in Collections: | Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| NB12531_Abstract.pdf | 3.15 MB | Adobe PDF | View/Open | |
| NB12531_Thesis.pdf Restricted Access | 5.95 MB | Adobe PDF | View/Open Request a copy |
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