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http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/13681| Title: | High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity |
| Authors: | Sankar, A. Ravi |
| Keywords: | Piezoresistive Accelerometer Prime-Axis Sensitivity Cross-Axis Sensitivity Electroplating Shadow Mask Bulk Micromachining Damping Analysis Temperature Sensitivity |
| Issue Date: | Jun-2009 |
| Publisher: | IIT Kharagpur |
| Gov't Doc #: | NB14113 |
| URI: | http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/13681 |
| Appears in Collections: | High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| NB14113_Abstract.pdf | 14.43 kB | Adobe PDF | View/Open | |
| NB14113_Thesis.pdf Restricted Access | 3.43 MB | Adobe PDF | View/Open Request a copy |
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