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  4. High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity
Please use this identifier to cite or link to this item: http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/13681
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dc.contributor.authorSankar, A. Ravi-
dc.date.accessioned2024-04-26T07:40:12Z-
dc.date.available2024-04-26T07:40:12Z-
dc.date.issued2009-06-
dc.identifier.govdocNB14113-
dc.identifier.urihttp://www.idr.iitkgp.ac.in/xmlui/handle/123456789/13681-
dc.language.isoenen_US
dc.publisherIIT Kharagpuren_US
dc.subjectPiezoresistive Accelerometeren_US
dc.subjectPrime-Axis Sensitivityen_US
dc.subjectCross-Axis Sensitivityen_US
dc.subjectElectroplatingen_US
dc.subjectShadow Masken_US
dc.subjectBulk Micromachiningen_US
dc.subjectDamping Analysisen_US
dc.subjectTemperature Sensitivityen_US
dc.titleHigh Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivityen_US
dc.typeThesisen_US
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