IDR - IIT Kharagpur
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2. Ph.D Theses of IIT Kharagpur
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Advanced Technology Development Center
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Performance Improvement of Mems Based Capacitive COMB Accelerometers
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Comb Structures (1)
MEMS Accelerometers (1)
Multi-Fold Springs (1)
Polysilicon Devices (1)
SOI Devices (1)
Trench-Free Method (1)
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