dc.contributor.author	Mukhyia, Ravindra
dc.date.accessioned	2010-08-12T05:27:48Z
dc.date.available	2010-08-12T05:27:48Z
dc.date.issued	2010
dc.identifier.govdoc	NB14232
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/695
dc.description.abstract	Micro-Electro-Mechanical system (MEMS) based accelerometers are vastly attractive due to their low cost, small size, low power consumption and robust performances. Acceleration sensors have wide varieties of applications in military, industry, medical, automotive and consumer electronics.	en
dc.language.iso	en	en
dc.publisher	IIT Kharagpur	en
dc.subject	CMOS	en
dc.title	Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer	en
dc.type	Thesis	en

Design and Development of a CMOS Compatible Bulk Micromachined Accelerometer

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