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MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems
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MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems
Pramanick, Bidhan
URI:
http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/1715
Date:
2012-09
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MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems
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