Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides

dc.contributor.author	Saha, Chumki
dc.date.accessioned	2024-05-07T10:50:03Z
dc.date.available	2024-05-07T10:50:03Z
dc.date.issued	2000-04
dc.identifier.govdoc	NB12531
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/14071
dc.language.iso	en	en_US
dc.publisher	IIT Kharagpur	en_US
dc.subject	Polysilicon	en_US
dc.subject	Silicon-Germanium	en_US
dc.subject	Thermal Oxidation	en_US
dc.subject	R.M.S. Roughness	en_US
dc.subject	Ion Beam Sputtering	en_US
dc.title	Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides	en_US
dc.type	Thesis	en_US