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Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides

Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides

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Author: Chumki Saha
Supervisor: Prof. S.K. Lahiri and Prof. S. K. Ray
Department of Physics and Meteorology
Indian Institute of Technology Kharagpur, India
April, 2000