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2. Ph.D Theses of IIT Kharagpur
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Physics & Meteorology
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Ion Assisted Processing of Polycrystalline Silicon, Silicon Germanium Films and Their Oxides
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Ion Beam Sputtering (1)
Polysilicon (1)
R.M.S. Roughness (1)
Silicon-Germanium (1)
Thermal Oxidation (1)

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