Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity

dc.contributor.author	Mukherjee, Rahul
dc.date.accessioned	2022-06-16T06:29:18Z
dc.date.available	2022-06-16T06:29:18Z
dc.date.issued	2018-04
dc.identifier.govdoc	NB16046
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/11245
dc.language.iso	en	en_US
dc.publisher	IIT Kharagpur	en_US
dc.subject	Thermal accelerometer	en_US
dc.subject	Thermal accelerometer on CMOS-MEMS platform	en_US
dc.subject	Heater structure	en_US
dc.subject	Cavity structure	en_US
dc.subject	Micromachined	en_US
dc.title	Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity	en_US
dc.type	Thesis	en_US