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2. Ph.D Theses of IIT Kharagpur
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Electronics & Electrical Communication Engineering
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Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity
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Browsing Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity by Subject

Browsing Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity by Subject

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Subject
Cavity structure [1]
Heater structure [1]
Micromachined [1]
Thermal accelerometer [1]
Thermal accelerometer on CMOS-MEMS platform [1]

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