1. DSpace at My University
  2. 2. Ph.D Theses of IIT Kharagpur
  3. Electronics & Electrical Communication Engineering
  4. Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices
Please use this identifier to cite or link to this item: http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2503
Full metadata record
DC FieldValueLanguage
dc.contributor.authorUMAPATHI, B.
dc.date.accessioned2014-09-04T10:54:53Z
dc.date.available2014-09-04T10:54:53Z
dc.date.issued1999
dc.identifier.govdocNB12452
dc.identifier.urihttp://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2503
dc.language.isoenen
dc.publisherIIT Kharagpuren
dc.subjectGermanosihcidien
dc.subjectTransformationen
dc.subjectAgglomerationen
dc.subjectNucleationen
dc.subjectPolymorphicen
dc.subjectEllipsometryen
dc.subjectModulationen
dc.subjectPreamorphisationen
dc.subjectImplantationen
dc.subjectPolysihconen
dc.subjectSilicon-germamumen
dc.subjectSputteringen
dc.subjectSalicideen
dc.titleSome Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devicesen
dc.typeThesisen
Appears in Collections:Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices

Files in This Item:
File Description SizeFormat 
NB12452_Abstract.pdf520.23 kBAdobe PDFThumbnail
View/Open
NB12452_Thesis.pdf
  Restricted Access		4.93 MBAdobe PDFView/Open Request a copy
Show simple item record


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.