Please use this identifier to cite or link to this item:
http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2503
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | UMAPATHI, B. | |
dc.date.accessioned | 2014-09-04T10:54:53Z | |
dc.date.available | 2014-09-04T10:54:53Z | |
dc.date.issued | 1999 | |
dc.identifier.govdoc | NB12452 | |
dc.identifier.uri | http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2503 | |
dc.language.iso | en | en |
dc.publisher | IIT Kharagpur | en |
dc.subject | Germanosihcidi | en |
dc.subject | Transformation | en |
dc.subject | Agglomeration | en |
dc.subject | Nucleation | en |
dc.subject | Polymorphic | en |
dc.subject | Ellipsometry | en |
dc.subject | Modulation | en |
dc.subject | Preamorphisation | en |
dc.subject | Implantation | en |
dc.subject | Polysihcon | en |
dc.subject | Silicon-germamum | en |
dc.subject | Sputtering | en |
dc.subject | Salicide | en |
dc.title | Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices | en |
dc.type | Thesis | en |
Appears in Collections: | Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
NB12452_Abstract.pdf | 520.23 kB | Adobe PDF | ![]() View/Open | |
NB12452_Thesis.pdf Restricted Access | 4.93 MB | Adobe PDF | View/Open Request a copy |
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