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dc.contributor.authorUMAPATHI, B.
dc.date.accessioned2014-09-04T10:54:53Z
dc.date.available2014-09-04T10:54:53Z
dc.date.issued1999
dc.identifier.govdocNB12452
dc.identifier.urihttp://www.idr.iitkgp.ac.in/xmlui/handle/123456789/2503
dc.language.isoenen
dc.publisherIIT Kharagpuren
dc.subjectGermanosihcidien
dc.subjectTransformationen
dc.subjectAgglomerationen
dc.subjectNucleationen
dc.subjectPolymorphicen
dc.subjectEllipsometryen
dc.subjectModulationen
dc.subjectPreamorphisationen
dc.subjectImplantationen
dc.subjectPolysihconen
dc.subjectSilicon-germamumen
dc.subjectSputteringen
dc.subjectSalicideen
dc.titleSome Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devicesen
dc.typeThesisen
Appears in Collections:Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices

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