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http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/11245| Title: | Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity |
| Authors: | Mukherjee, Rahul |
| Keywords: | Thermal accelerometer Thermal accelerometer on CMOS-MEMS platform Heater structure Cavity structure Micromachined |
| Issue Date: | Apr-2018 |
| Publisher: | IIT Kharagpur |
| Gov't Doc #: | NB16046 |
| URI: | http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/11245 |
| Appears in Collections: | Design of CMOS Bulk Micromachined Thermal Accelerometer for Higher Sensitivity |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| NB16046_Abstract.pdf | 14.37 kB | Adobe PDF | View/Open | |
| NB16046_Thesis.pdf Restricted Access | 7.25 MB | Adobe PDF | View/Open Request a copy |
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