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Studies on High-k Gate Dielectric Films on Strained-SiGe Heterolayers
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Studies on High-k Gate Dielectric Films on Strained-SiGe Heterolayers
Chatterjee, Somenath
(
IIT, Kharagpur
,
2003-09-01
)
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Author
Chatterjee, Somenath (1)
Subject
Gate Dielectrics (1)
High-k Materials (1)
MOS Capacitors (1)
TOFSIMS Analysis (1)
XPS Analysis (1)
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Date Issued
2003 (1)
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