Modeling, Performance Analysis and Testing of Electrostatically Actuated Micro and Nano Structures

dc.contributor.author	Mukherjee, Banibrata
dc.date.accessioned	2016-10-04T07:14:48Z
dc.date.available	2016-10-04T07:14:48Z
dc.date.issued	2016-09-01
dc.identifier.govdoc	NB15615
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/7087
dc.language.iso	en	en
dc.publisher	IIT, Kharagpur	en
dc.subject	Nano-Actuator	en
dc.subject	Comb Drive	en
dc.subject	Pull-In	en
dc.subject	Static and Dynamic Characteristics	en
dc.subject	Electrostatic Actuation	en
dc.subject	MEMS	en
dc.title	Modeling, Performance Analysis and Testing of Electrostatically Actuated Micro and Nano Structures	en
dc.type	Thesis	en