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Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices

Some Studies on Polycrystalline Silicon-Germanium Films, Silicides and Germanosilicides for Microelectronic Devices

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Auhtor : B.UMAPATHI
Guide : Prof. S.K. Lahiri and S. Kal
Department o f Electronics & Electrical Communication Engineering Indian Institute of Technology Kharagpur, 1999.