High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity

dc.contributor.author	Sankar, A. Ravi
dc.date.accessioned	2024-04-26T07:40:12Z
dc.date.available	2024-04-26T07:40:12Z
dc.date.issued	2009-06
dc.identifier.govdoc	NB14113
dc.identifier.uri	http://www.idr.iitkgp.ac.in/xmlui/handle/123456789/13681
dc.language.iso	en	en_US
dc.publisher	IIT Kharagpur	en_US
dc.subject	Piezoresistive Accelerometer	en_US
dc.subject	Prime-Axis Sensitivity	en_US
dc.subject	Cross-Axis Sensitivity	en_US
dc.subject	Electroplating	en_US
dc.subject	Shadow Mask	en_US
dc.subject	Bulk Micromachining	en_US
dc.subject	Damping Analysis	en_US
dc.subject	Temperature Sensitivity	en_US
dc.title	High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity	en_US
dc.type	Thesis	en_US