IDR - IIT Kharagpur
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2. Ph.D Theses of IIT Kharagpur
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Electronics & Electrical Communication Engineering
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High Performance Mems Piezoresistive Accelerometer with Reduced Cross-Axis Sensitivity
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Bulk Micromachining (1)
Cross-Axis Sensitivity (1)
Damping Analysis (1)
Electroplating (1)
Piezoresistive Accelerometer (1)
Prime-Axis Sensitivity (1)
Shadow Mask (1)
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