MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems http://127.0.0.1/xmlui/handle/123456789/1714 Sat, 17 Oct 2026 11:54:02 GMT 2026-10-17T11:54:02Z MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems http://127.0.0.1/xmlui/handle/123456789/1715 MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems Pramanick, Bidhan Sat, 01 Sep 2012 00:00:00 GMT http://127.0.0.1/xmlui/handle/123456789/1715 2012-09-01T00:00:00Z