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<title>Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices</title>
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<updated>2026-04-18T19:49:28Z</updated>
<dc:date>2026-04-18T19:49:28Z</dc:date>
<entry>
<title>Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices</title>
<link href="http://127.0.0.1/xmlui/handle/123456789/9244" rel="alternate"/>
<author>
<name>Mahapatra, Rajat</name>
</author>
<id>http://127.0.0.1/xmlui/handle/123456789/9244</id>
<updated>2018-07-16T04:58:43Z</updated>
<published>2004-09-01T00:00:00Z</published>
<summary type="text">Plasma Grown Gate Dielectrics on Group-IV Alloy Layers for Silicon Heterostructure Devices
Mahapatra, Rajat
</summary>
<dc:date>2004-09-01T00:00:00Z</dc:date>
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