MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems http://127.0.0.1/xmlui/handle/123456789/1714 2026-04-17T20:04:55Z 2026-04-17T20:04:55Z MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems Pramanick, Bidhan http://127.0.0.1/xmlui/handle/123456789/1715 2015-05-29T05:10:41Z 2012-09-01T00:00:00Z MEMS based Silicon Microvalve and Micropump for Controlled Fluid Delivery in Micropropulsion Systems Pramanick, Bidhan 2012-09-01T00:00:00Z